A predictive model of grinding force in silicon wafer selfrotating ...
WEBOct 1, 2016 · However, few study was carried on grinding force of silicon wafer selfrotating grinding. During wafer grinding, the grinding wheel and wafer are both selfrotating, and the grinding wheel continuously engages the surface of wafer, as shown in Fig. 1 (a). The wheel plunges into a wafer from edge to center, and then moves away .